The surface of a solid sample is irradiated with electron beams, and the secondary electrons, backscattered electrons, and characteristic X-ray generated from the sample are then detected, observed, and analyzed.
Usage
(1) Deeper focal depth than an optical microscope
(2) Observation of sample shape, fractured surface, and microscopic area
(3) Qualitative analysis of the observed portion's chemical composition
Device specifications
Equipment name
S-4700
SU6600
Accelerating voltage
0.5 to 30kV
0.5 to 30kV
Secondary electron resolution
1.5nm (accelerating voltage 15kV)
1.2nm
(accelerating voltage 30kV high vacuum mode)
2.5nm (accelerating voltage 1kV)
3.0nm(accelerating voltage 1kV high vacuum mode)
Backscattered electron resolution
3.0nm (accelerating voltage 15kV)
3.5nm (accelerating voltage 30kV high vacuum mode)
