Target material, New metal

Target and evaporation materials

Various types of target and evaporation materials are available from Daido to meet your application, manufacturing method and required performance needs. We promise to provide you with high-quality target and evaporation materials meeting your requirements for high purity, uniform composition, high density and low gas content.

 

Main applications	Purity	Material
Magnet recording film	3N～4N	Ni	Co	Fe
		Ni-alloy	Co-alloy	Cr
		Cr-alloy
Display film	3N～4N	Cr	Mo	Ta
		Ag-alloy
Semiconductor film, Electronic device film	3N～6N	Mo	Ta	W
		Ti	Ni
Magnet-Optical recording film	3N	Gd-Fe-Co	Tb-Fe-Co	Al-Ti
		Al-Cr	Al-V
Decorative film, Surface-hardening film	2N～3N	Ni-Cr-Mo	Zr	Hf
		Ti-Al	Ti-Al-V	Cr
		Ti
Resistor film	3N	Ni-Cr	Ni-V

• Please feel free to consult us regarding requirements for materials, shapes, backing plate fabrication and bonding other than those shown above.

Daido`s rare metals

Now, rare metals are being highlighted as ultimate materials excelling in heat resistance and corrosion resistance. Daido, making the best use of its know how accumulated through the specialty steel manufacturing over the years, produces high purity rare metals.

	Features	Properties
Ta	Extremely high in anti-acid corrosion resistance; following platinum	Melting point	2996℃
	Excellent in high-temperature strength	Specific gravity	16.6
	Excellent in dielectric properties	Crystal type	Body-centered cubic lattice
	Superb in affinity with oxygen, nitrogen and etc.(getter ability)	Young's modulus	18,200kgf/mm2
Nb	Second to tantalum in anti-acid corrosion resistance	Melting point	2468℃
	Excellent in high-temperature strength	Specific gravity	8.4
	Good in affinity with oxygen, nitrogen and etc.(getter ability)	Crystal type	Body-centered cubic lattice
		Young's modulus	10,700kgf/mm2
Zr	High in corrosion resistance, especially ti acid and alkali	Melting point	1852℃
	Highly flammable	Specific gravity	6.5
	Smaller in neutron absorption cross-section	Crystal type	Close-packed hexagonal lattice
		Young's modulus	10,100kgf/mm2
Mo	Extremely in heat resistance. Inferior to workability to tantalum and niobium, but less expensive.	Melting point	2610℃
		Specific gravity	10.2
	High corrosion resistance. Resistant enough to HCl and molten metal (Zn,Al,Na, etc.).	Crystal type	Body-centered cubic lattice
		Young's modulus	33,100kgf/mm2
W	High in melting point, gravity	Melting point	3410℃
	Excellent in high-temperature strength	Specific gravity	19.3
		Crystal type	Body-centered cubic lattice
		Young's modulus	41,500kgf/mm2

For further information including the following, please feel free to contact us;

• Hf, V, other rare metals, anti-corrosion and heat-resistant alloys.
• Sputtering targets, Evaporating targets, etc.

Corrosion resistance

Category	Chemicals	Concentration(%)	Ta	Nb	Zr	SUS316	DSalloy HC	Ti
Inorganic Acid	Hydrochloric Acid (HCl)	≦35	◎	◎	◎	△	○	△
	Sulfuric Acid (H2SO4)	≦95	◎	○	△	△	◎	△
	Nitric Acid (HN03)	≦68	◎	◎	◎	◎	○	◎
	Phosphoric Acid (H3PO4)	≦85	◎	◎	◎	◎	◎	○
	Aqua Regia (HCl+HNO3)	HCl+HNO3	◎	◎	△	△	◎	◎
	Hydrofluoric Acid (HF)	≦43	△	△	△	△	△	△
Organic Acid	Acetic Acid	100	◎	◎	◎	◎	◎	◎
	Formic Acid	50	◎	◎	◎	△	◎	◎
Alkali	Sodium Hydroxide	20	◎	◎	◎	◎	○	◎
		40	△	△	◎	◎	-	◎
Chloride	FeCl3	30	◎	◎	△	△	○	◎
	Sodium Chloride (NaCl)	Saturated at 20℃	◎	-	◎	○	◎	◎
	Magnesium Chloride (MgCl2)	42	◎	-	◎	◎	◎	◎
Corrosive Gas	Chlorine gas	wet	◎	◎	△	△	-	◎
	Chlorine water	Saturation with gas	◎	◎	△	△	○	◎

※At room temperature, Corrosion (mm/year): ◎=under 0.13, ○=0.13 to 1.3, △=over 1.13

Applications

For anti-corrosion	Pressure vessel, valve, piping, etc. for Chemical plants
For heat resistance	Parts for vacuum furnace equipment (heater,evaporation boat, crucible, holder, etc.)
Others	Cold cathode tubes, getter materials, etc