Clean Stainless Steel (316L) for Semiconductor Manufacturing Equipment
316L is a base material used for components such as valves, fittings, pipes, and chambers that come into contact with corrosive gases, requiring a high level of cleanliness.
In particular, our CLEANSTAR series has been adopted by customers for many years, earning a high level of trust.
CLEANSTAR® Series
We proudly present our high-purity SUS316L with confidence.
We offer three variations, each tailored with unique melting methods, compositions, and cost characteristics.
These products also conform to SUS316L (SEMI F20) specifications as defined by international SEMI standards for semiconductor manufacturing equipment.
Heat-Resistant and Corrosion-Resistant Alloys
These alloys are applied in cases where greater heat resistance and corrosion resistance are required compared to SUS316L.
Similar to SUS316L, they are used for components such as valves, fittings, pipes, and chambers that come into contact with corrosive gases or are exposed to higher temperatures.
Titanium Alloys
Titanium alloys are lightweight, have a high specific strength, exhibit excellent corrosion resistance, and are non-magnetic.
Functional Alloys: Soft Magnetic Materials and Low Thermal Expansion Alloys
These materials leverage the unique functional properties of nickel alloys.
Soft magnetic materials feature high permeability and extremely low coercive force.
Low thermal expansion alloys are used as metallic materials for fusion with glass or ceramics, as they have a thermal expansion coefficient similar to that of glass or ceramics.
Materials for Bellows
We offer a lineup of steel grades with excellent heat resistance and gas corrosion resistance.
Additionally, stainless steels with superior spring properties are available, allowing us to provide the optimal solution tailored to your specific needs.
We also offer sample materials for prototypes and other applications, so please feel free to contact us.
