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Materials for Semiconductor Manufacturing Equipment : Soft Magnetic Alloys
Soft Magnetic Alloys Map
Lineup
It has high magnetic permeability and low coercivity.
| Alloy | JIS | Common name | Examples of Applicable Components (※) |
Available Products | Specifications | |||
|---|---|---|---|---|---|---|---|---|
| Bar | Wire rod | Strip | ASTM | JIS | ||||
| MENPD | PD | Invar | Various Manufacturing and Inspection Equipment | 〇 | ◎ | ◎ | - | C2531 |
| MENPB | PB | - | Various Manufacturing and Inspection Equipment | 〇 | ◎ | ◎ | A753 | C2531 |
| MENPB-S | - | - | Various Manufacturing and Inspection Equipment | - | - | ◎ | - | |
| MENPC-1 | PC | - | Various Manufacturing and Inspection Equipment | 〇 | 〇 | ◎ | A753 | C2531 |
| MENPC-2 | PC | - | Various Manufacturing and Inspection Equipment | 〇 | ◎ | ◎ | - | C2531 |
| MENPC-2S | - | - | Various Manufacturing and Inspection Equipment | - | - | ◎ | - | - |
- ※Examples of applicable materials are excerpted from the implementation examples.
- ※For detailed information on possible manufacturing shapes, please contact us individually.
◎: Standard Product 〇: Manufacturable Product -: Not Applicable
Chemical Composition
DC magnetic properties (example performance data)
| Alloy | JIS | Common name | Nominal Chemical Composition (wt%) | |||||||
|---|---|---|---|---|---|---|---|---|---|---|
| C | Mn | P | S | Mo | Cu | Ni | Fe | |||
| MENPD | PD | Invar | ≦0.01 | 0.50 | ≦0.020 | ≦0.020 | - | - | 36.0 | bal. |
| MENPB | PB | - | ≦0.01 | 0.50 | ≦0.020 | ≦0.020 | - | - | 46.0 | bal. |
| MENPB-S | - | - | ≦0.01 | 0.50 | ≦0.020 | ≦0.020 | - | - | 48.0 | bal. |
| MENPC-1 | PC | - | ≦0.01 | 0.50 | ≦0.020 | ≦0.020 | 5.5 | - | 81.0 | bal. |
| MENPC-2 | PC | - | ≦0.01 | 0.50 | ≦0.020 | ≦0.015 | 4.5 | 3.5 | 78.0 | bal. |
| MENPC-2S | - | - | ≦0.01 | 0.50 | ≦0.020 | ≦0.015 | 4.5 | 3.5 | 78.0 | bal. |
Other Characteristics
| Alloy | Initial permeability μi |
Maximum permeability μm |
Coercivity Hc (A/m) |
Magnetic Flux Density B800(T) |
|---|---|---|---|---|
| MENPD | -5,000 | -25,000 | -8 | -1.2 |
| MENPB | -10,000 | -80,000 | -5 | -1.5 |
| MENPB-S | -10,000 | -100,000 | -3.5 | -1.5 |
| MENPC-1 | -90,000 | -190,000 | -0.95 | -0.75 |
| MENPC-2 | -110,000 | -200,000 | -0.80 | -0.75 |
| MENPC-2S | -130,000 | -300,000 | -0.75 | -0.7 |
- ※Magnetic properties were measured on machined test pieces after an appropriate magnetic annealing(1,100℃×2hrs, furnace cool, in dry hydrogen with dew point ≦-50℃) with a dew point ≤ -50°C)
- ※B800means magnetic flux density at an applied magnetic field of 800A/m.
| Alloy | General Characteristics of Alloys |
|---|---|
| MENPD | It features an extremely low coefficient of thermal expansion from cryogenic temperatures up to approximately 200℃, high volume resistivity, and excellent high-frequency characteristics. |
| MENPB | It is a Ni-Fe-based soft magnetic alloy characterized by high saturation magnetic flux density and relatively low coercivity, and is used in various electronic devices for components such as cores, moving parts, and magnetic shields. |
| MENPB-S | Through precise control of composition and heat treatment, this alloy achieves lower coercivity than MENPB. |
| MENPC-1 | It is a Ni-Fe-Mo-based soft magnetic alloy characterized by high initial permeability (μi) and extremely low coercivity. |
| MENPC-2 | It is a Ni-Fe-Cu-Mo-based soft magnetic alloy characterized by high initial permeability (μi) and extremely low coercivity. |
| MENPC-2S | While the basic composition is the same as MENPC-2, this alloy achieves even higher initial permeability through more precise control of its constituent elements. |
