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Materials for Semiconductor Manufacturing Equipment:Application Belows
Chemical Composition
| Classification | Alloy | UNS (JIS) |
Equivalent Alloy |
Nominal Chemical Composition (wt%) | |||||
|---|---|---|---|---|---|---|---|---|---|
| Ni | Cr | Mo | Co | Fe | Others | ||||
| Corrosion Resistance | DSALOY22 | N06022 | Hastelloy C-22 | Bal. | 20.0-22.5 | 12.5-14.5 | ≦2.5 | 2.0-6.0 | W 2.5-3.5 V≦0.35 |
| DSALOY625 | N06625 (NCF625) |
Inconel 625 | ≧58.0 | 20.0-23.0 | 8.0-10.0 | ≦1.0 | ≦5.0 | Al≦0.40 Ti≦0.40 Nb+Ta 3.15-4.15 |
|
| DSALOY242 | N10242 | HAYNES 242 | Bal. | 7.0-9.0 | 24.0-26.0 | ≦1.0 | ≦2.0 | Cu≦0.50 | |
| DSALOY C-276 | N10276 | Hastelloy C-276 | Bal. | 14.5-16.5 | 15.0-17.0 | ≦2.5 | 4.0-7.0 | W 3.0-4.0 V ≦0.35 |
|
| Corrosion Resistance (Age Hardening) |
DSP5 | S35000 | AM350 | 4.0-5.0 | 16.0-17.0 | 2.5-3.2 | - | Bal. | Mn 0.5-1.25 |
- ※Inconel is a registered trademark of Special Metals Corporation.
- ※Hastelloy is a registered trademark of Haynes International, Inc.
- ※AM350 is a registered trademark of Allegheny Technologies Inc.
General Characteristics of Alloys
| Classification | Alloy | General Characteristics of Alloys |
|---|---|---|
| Corrosion Resistance | DSALOY22 | Ni-Cr-Mo alloy with added W exhibits excellent corrosion resistance to all types of corrosion in both reducing and oxidizing environments. |
| DSALOY625 | Solution-strengthened Ni-Cr-Mo alloy with added Nb, which demonstrates high strength without heat treatment, offers excellent corrosion resistance in a wide range of severe corrosive environments. | |
| DSALOY242 | It exhibits excellent high-temperature strength and oxidation resistance, also suitable for high temperatures. Additionally, it features low thermal expansion. | |
| DSALOY C-276 | Excellent corrosion resistance in a wide range of severe corrosive environments, and also has good weldability. | |
| Corrosion Resistance (Age Hardening) |
DSP5 | It is semi-austenitic precipitation-hardening stainless steel, and heat treatment provides strength equivalent to martensitic stainless steels. It also offers excellent corrosion resistance to non-oxidizing acids. |
