Font Size
Materials for Semiconductor Manufacturing Equipment：Heat Resistant Alloys
Heat Resistant Alloys Map
Lineup
Applied to components requiring higher heat resistance.
| Alloy | UNS (JIS) |
Equivalent Alloy |
Examples of Applicable Components (※) |
Available Products | Specifications | |||
|---|---|---|---|---|---|---|---|---|
| Bar | Wire rod | Strip | ASTM | JIS | ||||
| DSALOY600 | N06600 (NCF600) |
Inconel 600 | Valves, regulators, diaphragms, | ◎ | ◎ | ◎ | B166 B168 B564 |
G4901 G4902 |
| DSALOY625 | N06625 (NCF625) |
Inconel 625 | Valves, fittings, pipes. | ◎ | ◎ | ◎ | B443 B446 B564 |
G4901 G4902 |
| DSALOY800 | N08800 (NFC800) |
- | ◎ | ◎ | ◎ | B408 B409 B564 |
G4901 G4902 |
|
| DSALOYX-750 | N07750 (NCF750) |
Inconel X750 | Valves, regulators, diaphragms, | ◎ | ◎ | ◎ | B637 | G4901 G4902 |
| DSALOY718 | N07718 (NCF718) |
Inconel 718 | Valves, regulators, diaphragms, | ◎ | ◎ | ◎ | B637 B670 |
G4901 G4902 |
| DSA760 | - | - | - | ○ | ◎ | - | - | - |
- ※The examples of applicable components are extracted from practical examples and SEMI F105 (Guide for Metallic Material Compatibility in Gas Distribution Systems).
- ※For detailed information on possible manufacturing shapes, please contact us individually.
◎：Standard 〇：Available -：Not Available - ※Inconel is a registered trademark of Special Metals Corporation.
Chemical Composition
| Classification | Alloy | UNS (JIS) |
Equivalent Alloy |
Nominal Chemical Composition (wt%) | |||||
|---|---|---|---|---|---|---|---|---|---|
| Ni | Cr | Mo | Co | Fe | others | ||||
| Heat Resistance (Solid Solution Strengthened Type) |
DSALOY600 | N06600 (NCF600) |
Inconel 600 | ≧72.0 | 14.0- 17 |
- | - | 6.0- 10 |
Cu≦0.50 |
| DSALOY625 | N06625 (NCF625) |
Inconel 625 | ≧58.0 | 20.0- 23.0 |
8.0- 10.0 |
≦1.0 | ≦5.0 | Al≦0.40 Ti≦0.40 Nb+Ta 3.15-4.15 |
|
| DSALOY800 | N08800 (NCF800) |
30.0- 35.0 |
19.0- 23.0 |
- | - | ≧39.5 | C≦0.10 Cu≦0.75 Al 0.15-0.60 Ti 0.15-0.60 |
||
| High Temperature Strength (Precipitation Strengthened Type) |
DSALOYX-750 | N07750 (NCF750) |
Inconel X750 | ≧70.0 | 14.0- 17.0 |
- | - | 5.0- 9.0 |
Cu≦0.50 Ti 2.25-2.75 Al 0.40-1.00 Nb+Ta 0.70-1.20 |
| DSALOY718 | N07718 (NCF718) |
Inconel 718 | 50.0- 55.0 |
17.0- 21.0 |
2.8- 3.3 |
- | bal. | Cu≦0.30 Ti 0.65-1.15 Al 0.20-0.80 B ≦0.006 Nb+Ta 4.75-5.50 |
|
| DSA760 | - | - | bal. | (38) | - | - | - | (Al 3.8) | |
- ※Inconel is a registered trademark of Special Metals Corporation.
Other Characteristics
| Classification | Alloy | Heat Treatment | Tensile Strength (N/mm2) | Elongation (%) |
|---|---|---|---|---|
| Heat Resistance (Solid Solution Strengthened Type) |
DSALOY600 | A | ≧550 | ≧30 |
| DSALOY625 | A | ≧760 | ≧30 | |
| DSALOY800 | A | ≧520 | ≧30 | |
| High Temperature Strength (Precipitation Strengthened Type) |
DSALOYX-750 | ST+AG | ≧960 | ≧8 |
| DSALOY718 | ST+AG | ≧1,240 | ≧10 | |
| DSA760 | ST+AG | ≧1,500 | - |
| Classification | Alloy | General Characteristics of Alloys |
|---|---|---|
| Heat Resistance (Solid Solution Strengthened Type) |
DSALOY600 | It has excellent oxidation resistance at high temperatures, strong resistance to stress corrosion cracking caused by Cl- ions, and superior corrosion resistance in high purity water and alkalis. |
| DSALOY625 | It is a solid solution strengthened Ni-Cr-Mo alloy with added Nb that exhibits high strength without heat treatment and has excellent corrosion resistance in a wide range of severe corrosive environments. | |
| DSALOY800 | It has good strength and oxidation/carburization resistance in high humidity atmospheres, maintains structural stability over long periods, exhibits excellent corrosion resistance in wet environments, and has good workability. | |
| High Temperature Strength (Precipitation Strengthened Type) |
DSALOYX-750 | It is a precipitation strengthened Ni-Cr alloy that exhibits excellent oxidation resistance, tensile strength, creep properties, and resistance to relaxation up to approximately 700℃, along with good corrosion resistance. |
| DSALOY718 | It is a precipitation strengthened Ni alloy that combines high temperature strength and corrosion resistance, and exhibits excellent creep properties up to 700℃. | |
| DSA760 | It is a precipitation strengthened Ni-Cr alloy that is non-magnetic, has high hardness, and exhibits high corrosion resistance. The hardness is at the same level as martensitic stainless steel. |
