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Materials for Semiconductor Manufacturing Equipment：Titanium Alloy
Corrosion Resistant Alloys (Corrosion Resistant Alloys, Titanium Alloys) Map
Lineup
| DAIDO BRAND | Typical corresponding standard | Examples of Applicable Components (※) |
Available Products | ||
|---|---|---|---|---|---|
| Bar | Wire rod | Strip | |||
| DAT5 | JIS Class 60 | Various Manufacturing and Inspection Equipment | ◎ | 〇 | - |
| ASTM Grade 5 | Various Manufacturing and Inspection Equipment | ◎ | 〇 | - | |
| DIN3 7164 | Various Manufacturing and Inspection Equipment | 〇 | 〇 | - | |
| AMS 4928 | Various Manufacturing and Inspection Equipment | 〇 | 〇 | - | |
| DAT54 | Daido original Standard | Various Manufacturing and Inspection Equipment | 〇 | - | - |
| DAT57M | Daido original(VLTi) ASTM Grade41 | Various Manufacturing and Inspection Equipment | 〇 | 〇 | - |
- ※Examples of applicable materials are excerpted from the implementation examples.
- ※For detailed information on possible manufacturing shapes, please contact us individually.
◎: Standard Product 〇: Manufacturable Product -: Not Applicable
Chemical Composition
| DAIDO BRAND | Typical corresponding standard | Chemical Composition (wt%) | ||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| N | C | H | Fe | O | Al | V | Ti | others | ||
| DAT5 | JIS Class 60 | ≦0.05 | ≦0.08 | ≦0.015 | ≦0.40 | ≦0.20 | 5.50-6.75 | 3.50-4.50 | Bal | |
| ASTM Grade 5 | ≦0.05 | ≦0.08 | ≦0.015 | ≦0.40 | ≦0.20 | 5.5-6.75 | 3.5-4.5 | Bal | ||
| DIN3 7164 | ≦0.05 | ≦0.08 | ≦0.0125 | ≦0.30 | ≦0.20 | 5.5-6.75 | 3.5-4.5 | Bal | ||
| AMS 4928 | ≦0.05 | ≦0.08 | ≦0.0125 | ≦0.30 | ≦0.20 | 5.50-6.75 | 3.50-4.50 | Bal | Y≦0.005 | |
| DAT54 | Daido original Standard |
≦0.05 | ≦0.20 | ≦0.015 | ≦1.00 | ≦0.25 | 5.5-6.5 | Bal | Si 0.2-0.7 Mo 2.5-3.5 Sn 3.0-4.5 Zr 3.0-4.0 Nb 0.4-1.0 |
|
| DAT57M | Daido original(VLTi) ASTM Grade41 |
≦0.05 | ≦0.10 | ≦0.015 | 0.4-1.5 | ≦0.30 | 5.5-6.5 | - | Bal | |
Other Characteristics
| DAIDO BRAND | Typical corresponding standard | Heat Treatment | Tensile Strength (N/mm2) |
Elongation (%) |
|---|---|---|---|---|
| DAT5 | JIS Class 60 | A | ≧895 | ≧10 |
| ASTM Grade 5 | A | ≧895 | ≧10 | |
| DIN3 7164 | A | ≧900 | ≧10 | |
| AMS 4928 | A | ≧896 | ≧10 | |
| DAT54 | Daido original Standard | A | ≧895 | ≧5 |
| DAT57M | Daido original(VLTi) ASTM Grade41 | A | ≧895 | ≧10 |
| DAIDO BRAND | General Characteristics of Alloys |
|---|---|
| DAT5 | It has a low specific gravity, high specific strength, excellent corrosion resistance, and is non-magnetic. |
| DAT54 | It exhibits excellent thermal stability, oxidation resistance, and creep strength at high temperatures. |
| DAT57M | It has a strength level equivalent to DAT5, with excellent corrosion resistance and non-magnetic properties |
